@article{759566,
  author = {Qiliang Li and Sang-Mo Koo and Monica Edelstein and John Suehle and Curt Richter},
  title = {Silicon Nanowire Electromechanical Switches for Logic Device Application},
  year = {2007},
  number = {18},
  month = {2007-07-06 00:07:00},
  publisher = {Nanotechnology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32567},
  language = {en},
}