TY  - JOUR
AU  - Qiliang Li
AU  - Sang-Mo Koo
AU  - Monica Edelstein
AU  - John Suehle
AU  - Curt Richter
C2  - Nanotechnology
DA  - 2007-07-06 00:07:00
LA  - en
M1  - 18
PB  - Nanotechnology
PY  - 2007
TI  - Silicon Nanowire Electromechanical Switches for Logic Device Application
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32567
ER  -