NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.
Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.
An official website of the United States government
Here’s how you know
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
SEM Sentinel - SEM Performance Measurement System, Part 1
Published
Author(s)
Alice V. Ling, Andras Vladar, Bradley N. Damazo, M A. Donmez, Michael T. Postek
Abstract
This report describes the current design of a system for monitoring the performance of several major subsystems of a scanning electron microscope (SEM). The following subsystems and the associated functional parameters will be monitored. 1) Vacuum system with pressure as a function of time being recorded for the electron-optical column (gun chamber), the specimen chamber, and the sample-loading unit. 2) Several components of the wafer handling system will be timed. 3) The electron gun emission currents and other signals to monitor focal properties of the condenser and objective lenses may be used to correlate with image quality. Experiments are described for tests involving diagnosis of the vacuum system.
Ling, A.
, Vladar, A.
, Damazo, B.
, Donmez, M.
and Postek, M.
(2000),
SEM Sentinel - SEM Performance Measurement System, Part 1, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
(Accessed October 11, 2025)