@misc{190051,
  author = {Alice Ling and Andras Vladar and Bradley Damazo and M Donmez and Michael Postek},
  title = {SEM Sentinel - SEM Performance Measurement System, Part 1},
  year = {2000},
  month = {2000-04-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}