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Search Publications by: Theodore V. Vorburger (Assoc)

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Displaying 201 - 225 of 417

Surface Metrology Software Variability in Two-Dimensional Measurements

January 1, 2003
Author(s)
Ndubuisi G. Orji, Theodore V. Vorburger, Xiaohong Gu, Jayaraman Raja
A range of surface texture measurement instruments is available in the market place. Most of the measurement instruments are microcomputer-based systems that contain their own surface analysis software to evaluate measured roughness profiles. After a

Standards for Bullets and Casings

November 1, 2002
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Robert A. Clary, Eric P. Whitenton, Li Ma, Susan M. Ballou
The National Institute of Standards and Technology is developing reference standards through its Office of Law Enforcement Standards with funding provided by the National Institute of Justice. The standard reference materials are used by crime laboratories

Atomic Force Microscopy of Semiconductor Line Edge Roughness

October 1, 2002
Author(s)
N G. Orji, Jayaraman Raja, Theodore V. Vorburger
Over the last two decades the width of patterned lines on semiconductor devices has continuously decreased. Based on technology trends predicted by the International Technology Roadmap for Semiconductors (ITRS), the linewidth of isolated gate lines on

NIST RM (Reference Material) 8240/8250 Standard Bullets and Casings Project

September 1, 2002
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Susan M. Ballou, M Ols
The NIST RM (Reference Material) 8240/8250 Standard Bullets and Casings Project aims to support the National Integrated Ballistics Information Network (NIBIN) in the U.S. Two prototype standard bullets were developed in 1998 with all six lands manufactured

Establishment of Ballistics Measurement Traceability Using NIST RM 8240 Standard Bullets

August 1, 2002
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Robert A. Clary, Eric P. Whitenton
The NIST RM (Reference Material) 8240 standard bullets are being developed to support the traceability of ballistics measurements nationwide. Six master bullets from ATF and FBI are measured at NIST using a stylus measurement system. The resulting set of

Standards for Optical Imaging Systems in Forensic Laboratories

August 1, 2002
Author(s)
Jun-Feng Song, Theodore V. Vorburger, Robert A. Clary, Eric P. Whitenton, Li Ma, Susan M. Ballou
NIST RM (Reverence Material) 8240/2350 standard bullet and casing project is currently ongoing to support the National Integrated Ballistics Information Network (NIBIN) in the US. The original bullet signatures were traced on six master bullets from

In the Rough

March 1, 2002
Author(s)
Theodore V. Vorburger, Joseph Fu, N G. Orji
Surface roughness affects the function of a wide variety of engineering components, including airport runways, highways, ship hulls and mechanical parts. Perhaps the most demanding applications are in the optics and semiconductor industries. Surface

Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT

January 1, 2002
Author(s)
Robert Allen, J J. Pellegrino, D Monk, E C. Teague, Dennis A. Swyt, Joseph Fu, Richard M. Silver, Theodore V. Vorburger, Bradley N. Damazo, Robert Russell, Thomas E. Wheatley, Keith A. Stouffer, Manfred Osti, David Wilmering, Richard L. Rhorer, Ram D. Sriram
This report describes the accomplishments of the Nanomanufacturing of Atom-based Dimensional Standards Project, which operated as part of the National Advanced Manufacturing Testbed (NAMT) a program formally operating from fiscal year (FY) 1996 to FY 2000

Progress in Developing NIST Standard Casings

January 1, 2002
Author(s)
Jun-Feng Song, Theodore V. Vorburger, M Ols
Standard casings and bullets are currently under development to support the National Integrated Ballistics information Network (NIBIN). The master casings are obtained from the ATF''s National Laboratory Center at Rockville, MD, by a standardized shooting

Toward Traceability for At Line AFM Dimensional Metrology

January 1, 2002
Author(s)
Ronald G. Dixson, Angela Guerry, Marylyn H. Bennett, Theodore V. Vorburger, Michael T. Postek
The in-line and at-line measurement tools for critical dimension (CD) metrology in semiconductor manufacturing are technologically advanced instruments that exhibit excellent measurement repeatability--below 1 nm in some cases. Accuracy, however, is

Silicon Single Atom Steps as AFM Height Standards

August 1, 2001
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, V W. Tsai, E. C. Williams, Theodore V. Vorburger, H Edwards, D Cook, P West, R Nyffenegger
Atomic force microscopes (AFMs) are used in the semiconductor industry for a variety of metrology purposes. Step height measurements at the nanometer level and roughness measurements at sub-nanometer levels are often of interest. To perform accurate

Analysis of Dimensional Metrology Standards

June 1, 2001
Author(s)
Thomas R. Kramer, John Evans, Simon P. Frechette, John A. Horst, Hui-Min Huang, Elena R. Messina, Frederick M. Proctor, William G. Rippey, Harry A. Scott, Theodore V. Vorburger, Albert J. Wavering
This is an analysis of standards related to dimensional metrology, with recommendations regarding standards development. The analysis focuses on the degree to which existing and developing standards provide a complete set of non-overlapping specifications
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