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Search Publications by: Theodore V. Vorburger (Assoc)

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Displaying 326 - 350 of 417

Calibration and Fabrication Facilities for Optical Surfaces

January 1, 1997
Author(s)
Theodore V. Vorburger, Christopher J. Evans, C Asmail
NIST has calibration facilities and research services available for characterization of optical surfaces and optical figuring and finishing. The calibration facilities are for measurement of optical scatter, figure, and surface finish, and the fabrication

Industrial Uses of STM and AFM

January 1, 1997
Author(s)
Theodore V. Vorburger, John A. Dagata, G. Wilkening, K Iizuka
We review the field of STM and AFM as applied to industrial problems, and we classify the applications into four classes: research with potential benefit to industry, research performed by industry, applications off-line in manufacturing, and applications

Measurement Comparison of Stylus Radii

January 1, 1997
Author(s)
Jun-Feng Song, Theodore V. Vorburger
Three methods were used for measuring the radii of the same stylus of our stylus instrument. The measurement results were compared and showed good agreement. Using razor blade tracing, the stylus radius was measured as r=1.60um with an expanded uncertainty

Pitch and Step Height Measurements Using NIST

January 1, 1997
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger, Edwin R. Williams, X Wang
The use of the atomic force microscope (AFM) for step height and pitch measurements in industrial applications is rapidly increasing. To compare the results obtained by different instruments and to achieve high accuracy, the scales of an AFM must be

Stylus-Laser Surface Calibration System

October 1, 1996
Author(s)
Theodore V. Vorburger, Jun-Feng Song, T Giauque, Thomas Brian Renegar, Eric P. Whitenton, M Croarkin
A stylus-laser surface calibration system was developed to calibrate the NIST sinusoidal roughness Standard Reference Materials (SRM) 2071-2075. Step height standards are used to calibrate the stylus instrument in the vertical direction, and a laser

Calibration of Scanning Electron Microscope Magnification Standards SRM-484

May 1, 1996
Author(s)
Joseph Fu, Theodore V. Vorburger, D Ballard
Standard Reference Material (SRM) 484 is an artifact for calibrating the magnification scale of a scanning electron microscope. Since 1977 the National Institute of Standards and Technology (NIST) has produced seven issues of SRM484 amounting to

Height Calibration of Atomic Force Microscopes Using Silicon Atomic Step Artifacts

January 1, 1996
Author(s)
V W. Tsai, Theodore V. Vorburger, P Sullivan, Ronald G. Dixson, Richard M. Silver, Edwin R. Williams, J Schneir
The decreasing feature dimensions required in the semiconductor manufacturing industry are placing ever increasing demands upon metrology instruments. Atomic force microscopes (AFMs), which can have 1 nm lateral resolution and sub-angstrom vertical

Stylus Flight in Surface Profiling

January 1, 1996
Author(s)
Jun-Feng Song, Theodore V. Vorburger
In this paper, theoretical and experimental work on stylus flight is described. Experiments on the surfaces of different roughness specimens with sinusoidal, rectangular, triangular and random waveforms support the theoretical model, which predicts stylus
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