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Search Publications by: Theodore V. Vorburger (Assoc)

Displaying 276 - 300 of 417

Project Report (1998-99) of NIST Standard Bullets and Casings (National Institute of Standards and Technology, Gaithersburg, MD)

January 1, 2000

Author(s)

Jun-Feng Song, Theodore V. Vorburger

Abstract not available.

The Role of Periodic Interferometer Errors in the Calibration of Capacitance Displacement Sensors for Nanometrology Applications

January 1, 2000

Author(s)

R Koning, Ronald G. Dixson, Joseph Fu, Theodore V. Vorburger

Although the role of the periodic errors of optical heterodyne interferometers in displacement measurements is fairly well understood, their influence on the calibration of other types of displacement sensors do not seem to be studied as extensively. We

A First Stop Towards Photorealistic Rendering of Coated Surfaces and Computer Based Standards of Appearance

November 1, 1999

Author(s)

Fern Y. Hunt, Egon Marx, G W. Meyer, Theodore V. Vorburger, P A. Walker, H B. Westlund

We seek to explore the feasibility of producing computer graphic images to visualize the color and gloss of surfaces using optical and surface topographical data.

Step Height Metrology for Data Storage Applications

November 1, 1999

Author(s)

R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek

The measurements of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) are quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Step-height Metrology for Data Storage Applications

November 1, 1999

Author(s)

R Koning, Ronald G. Dixson, Joseph Fu, Thomas Brian Renegar, Theodore V. Vorburger, V W. Tsai, Michael T. Postek

The measurement of bump heights and pit depth on compact discs (CD) with atomic force microscopes (AFMs) is quite different from the measurement of step heights on step height calibration standards. Both the bumps and the pits show much larger transition

Effects of Defocus and Algorithm on Optical Step Height Calibration

July 1, 1999

Author(s)

Theodore D. Doiron, Theodore V. Vorburger, P Sullivan

Defocus effects on step height measurements by interferometric microscopy are estimated using different algorithms to calculate the step height. The interferometric microscope is a Mirau-type with a 20x objective and a numerical aperture (NA) of 0.4. Even

Dimensional Metrology with the NIST Calibrated Atomic Force Microscope

June 1, 1999

Author(s)

Ronald G. Dixson, R Koning, V W. Tsai, Joseph Fu, Theodore V. Vorburger

Atomic force microscopes (AFMs) are increasingly used in the semiconductor industry as tools for submicrometer dimensional metrology. The scales of an AFM must be calibrated in order to perform accurate measurements. We have designed and developed the

High Accuracy High Speed Gaussian Filter in Surface Metrology

May 31, 1999

Author(s)

Y B. Yuan, Jun-Feng Song, Theodore V. Vorburger

Both (1+x^2)^(-n) and (sin x/x)^n functions are very close to the Gaussian distribution for large value of n. Based on these functions, two new algorithms are developed for designing high accuracy and high speed recursive type Gaussian digital filters. The

Measurements and Predictions of Light Scattering by Coatings

May 1, 1999

Author(s)

Theodore V. Vorburger, Egon Marx, M E. McKnight, Maria Nadal, P Y. Barnes, Alan Keith Thompson, Michael Galler, Fern Y. Hunt, Mark R. VanLandingham

We show comparisons between calculations and measurements of angle-resolved light scattering distributions from clear dielectric, isotropic coatings. The calculated distributions are derived from topography measurements performed with scanning white light

Algorithms for Calculating Single-Atom Step Heights

January 1, 1999

Author(s)

Joseph Fu, V W. Tsai, R Koning, Ronald G. Dixson, Theodore V. Vorburger

Recently, measuring Si(111) single atomic steps prompted us to investigate the measuring technique. The section technique is the most popular method for measuring the height. By measuring a simulated Si(111) atomic step, we have found it could have an

Measurements in Predictions of Light Scattering by Coatings

January 1, 1999

Author(s)

E Marx, P Y. Barnes, Maria Nadal, Alan Keith Thompson, M R. Vanlandingham, M Galler, M E. Mcknight, F Y. Hunt, Theodore V. Vorburger

NIST Microform Calibration - How Does It Benefit U.S. Industry?

October 1, 1998

Author(s)

Jun-Feng Song, Theodore V. Vorburger

In microform metrology, complex 3-D surface features in the micrometer range must be quantified for their space and size including dimensions, curves, angles, profile deviations, and alignment errors, as well as surface roughness with measurement

NIST Virtual/Physical Random Profile Roughness Calibration Standards

October 1, 1998

Author(s)

Jun-Feng Song, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Theodore V. Vorburger, Y B. Yuan

The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles

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