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Search Publications by: Steve Semancik (Fed)

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Displaying 176 - 200 of 213

Solid State Gas Microsensors for Environmental and Industrial Monitoring

January 1, 1999
Author(s)
R M. Walton, Richard E. Cavicchi, Stephen Semancik, B Panchapakesan, Don L. DeVoe, M I. Aquino-Class, J D. Allen, John S. Suehle
We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called microhotplates

Kinetically-Controlled Chemical Sensing Using Micromachined Structures

May 1, 1998
Author(s)
Stephen Semancik, Richard E. Cavicchi
Microdevices produced by machining silicon can offer a variety of control functionality on a miniature scale, 1.2 with general advantages connected to not only reduced size (less invasive), but also lower power requirements, lower cost, and reproducibility

Time-Dependent Conductance of Pd-Dosed SnO2 (110)

January 1, 1998
Author(s)
Richard E. Cavicchi, V Sukharev, Stephen Semancik
Time-dependent phenomena related to the reaction of ultrathin films of Pd deposited on SnO2 (110) surfaces of differing oxygen content have been investigated. Conductance measurements and x-ray photoemission spectroscopy (XPS) were used to characterize