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Displaying 101 - 125 of 160

Selection of Alternatives to Liquid-in-Glass Thermometers

October 1, 2005
Author(s)
Dean C. Ripple, Gregory F. Strouse
A desire to increase automation or to eliminate the use of mercury has prompted several ASTM committees to consider alternatives to ASTM Liquid-in-Glass (LiG) thermometers. In this paper, we address the technical issues of choosing an alternative. We first

Uncertainty Budgets for Comparison Calibrations of Thermocouples

August 7, 2005
Author(s)
Dean C. Ripple, K Garrity
By means of concrete examples, we discuss the determination of an uncertainty budget for calibration of thermocouples by comparison techniques. In the first example, the calibration of a type T thermocouple (copper versus copper-nickel alloy) in a stirred

Comparing the Transient Response of a Resistive-Type Sensor With a Thin Film Thermocouple During the Post-Exposure Bake Process

April 1, 2004
Author(s)
Kenneth G. Kreider, D P. DeWitt, J B. Fowler, J E. Proctor, William A. Kimes, Dean C. Ripple, Benjamin K. Tsai
Recent studies on dynamic temperature profiling and lithographic performance modeling of the post-exposure bake (PEB) process have demonstrated that the rate of heating and cooling may have an important influence on resist lithographic response. Generally

Calibration of Radiation Thermometers in Rapid Thermal Processing Tools Using Si Wafers with Thin Film Thermocouples

October 1, 2003
Author(s)
Kenneth G. Kreider, William A. Kimes, Christopher W. Meyer, Dean C. Ripple, Benjamin K. Tsai, D H. Chen, D P. DeWitt
Rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiation thermometers (LPRTs) which have been calibrated with thermocouple instrumented wafers. We have developed a thin-film thermocouple wafer that enables more

Comment On 'General Principles for the Definition of the Base Units in the SI'

October 1, 2003
Author(s)
Michael R. Moldover, Dean C. Ripple
Recently, Kose et al. proposed general principles that should guide any future discussions regarding the redefinition of the SI base units and they illustrated their principles with an example of a revised SI. Part of their example (redefinition of the

A Four-Zone Furnace for Realization of Silver and Gold Freezing Points

September 1, 2003
Author(s)
Dean C. Ripple, K Garrity, Christopher W. Meyer
Recently, the Thermocouple Calibration Laboratory at the National Institute of Standards and Technology has used sodium heat-pipe furnaces for the realization of ITS-90 freezing points of aluminum, silver, and gold. When using a fixed-point cell mounted in

Progress in Primary Acoustic Thermometry at NIST: 273 K to 505 K

September 1, 2003
Author(s)
Gregory F. Strouse, Dana R. Defibaugh, Michael R. Moldover, Dean C. Ripple
The NIST Acoustic Thermometer determines the thermodynamic temperature by measuring the speed of sound of argon in a spherical cavity. We obtained the thermodynamic temperature of three fixed points on the Interna-tionalTemperature Scale of 1990: the

Techniques for Primary Acoustic Thermometry to 800 K

September 1, 2003
Author(s)
Dean C. Ripple, Dana R. Defibaugh, Michael R. Moldover, Gregory F. Strouse
The NIST Primary Acoustic Thermometer will measure the difference between the International TemperatureScale of 1990 and the Kelvin Thermodynamic Scale throughout the range 273 K to 800 K with uncertainties of only afew millikelvins. The acoustic

Review of Traceable Temperatures and Temperature Measurement

September 1, 2002
Author(s)
Dean C. Ripple
Traceable Temperatures outlines the most common methods of measuring temperature and teaches the reader practical skills in assuring that those measurements are made with confidence at a known level of uncertainty. For a beginning user of thermometers or

Standard Reference Material 1749: Au/Pt Thermocouple Thermometer

March 1, 2002
Author(s)
Dean C. Ripple, G W. Burns
Standard Reference Material (SRM) 1749 is a lot of 18 specially-constructed gold versus platinum (Au/Pt) thermocouple thermometers, each calibrated on the International Temperature Scale of 1990 (ITS-90) and supplied with integral lead wires and a
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