October 19, 2008
Author(s)
Jing Li, Yin-Lin Shen, Jaehwa Jeong, Fredric Scire, John A. Kramar
A compact, two-stage, vertical actuator with built-in sensors has been developed for the Molecular Measuring Machine (M3) and other potential precision instrumentation applications, such as scanning probe microscopy (SPM). In this article, we describe the