Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable
Janet M. Cassard, Jon C. Geist, John A. Kramar
The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.
, Geist, J.
and Kramar, J.
Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914939
(Accessed May 30, 2023)