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PUBLICATIONS

Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable

Published

Author(s)

Janet M. Cassard, Jon C. Geist, John A. Kramar

Abstract

The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.
Citation
ECS Transactions
Pub Type
Journals

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Keywords

homogeneous, MEMS 5-in-1, MEMS Calculator, Reference Material, RM 8096, RM 8097, stability, test chip
Reference materials

Citation

Cassard, J. , Geist, J. and Kramar, J. (2014), Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914939 (Accessed October 10, 2025)

Issues

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Created May 14, 2014, Updated February 19, 2017
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