Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable

Published

Author(s)

Janet M. Cassard, Jon C. Geist, John A. Kramar

Abstract

The NIST Microelectromechanical Systems (MEMS) 5-in-1 Reference Materials (RMs) were developed to assist users in validating their use of five documentary standard test methods. A Reference Material can be defined as a material whose property values are sufficiently homogeneous, stable, and well established such that the values can be used in the assessment of a measurement method. This paper presents the data that are used to characterize the RMs as homogeneous and stable.
Citation
ECS Transactions

Keywords

homogeneous, MEMS 5-in-1, MEMS Calculator, Reference Material, RM 8096, RM 8097, stability, test chip

Citation

Cassard, J. , Geist, J. and Kramar, J. (2014), Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable, ECS Transactions, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914939 (Accessed May 20, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created May 14, 2014, Updated February 19, 2017