@article{16711,
  author = {Janet Cassard and Jon Geist and John Kramar},
  title = {Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable},
  year = {2014},
  month = {2014-05-14},
  publisher = {ECS Transactions},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914939},
  language = {en},
}