TY  - JOUR
AU  - Janet Cassard
AU  - Jon Geist
AU  - John Kramar
C2  - ECS Transactions
DA  - 2014-05-14
LA  - en
PB  - ECS Transactions
PY  - 2014
TI  - Reference Materials 8096 and 8097 - The MEMS 5-in-1 RMs: Homogeneous and Stable
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=914939
ER  -