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Search Publications by: Joseph T. Hodges (Fed)

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Displaying 76 - 100 of 112

Automated Continuous-Flow Gravimetric Hygrometer as a Primary Humidity Standard

May 1, 2008
Author(s)
Christopher W. Meyer, Joseph T. Hodges, R W. Hyland, Gregory E. Scace, J Valencia-Rodriguez, James R. Whetstone
A new primary gravimetric hygrometer has been completed at the National Institute of Standards and Technology (NIST). This apparatus determines the humidity in a steadily flowing gas stream by first separating the water from the carrier gas using

High Temperature Electrical Resistance of substrate-supported Single Walled Carbon Nanotubes

January 1, 2008
Author(s)
Richard E. Cavicchi, C Avedisian, Paul M. McEuen, Xinjian Zhou, Wilbur S. Hurst, Joseph T. Hodges
We report the electrical characteristics of two substrate-supported metallic single walled carbon nanotubes (SWNT) at temperatures up to 573 K over a range of bias voltages for zero gate voltage in air under atmospheric pressure. At low voltages or high

In Situ Gas Phase Diagnostics for Hafnium Oxide Atomic Layer Deposition

January 1, 2008
Author(s)
James E. Maslar, Wilbur S. Hurst, Donald R. Burgess Jr., William A. Kimes, Nhan V. Nguyen, Elizabeth F. Moore, Joseph T. Hodges
Atomic layer deposition (ALD) is an important method for depositing the nanometer-scale, conformal high  dielectric layers required for many nanoelectronics applications. In situ monitoring of ALD processes has the potential to yield insights that will

High-Resolution Cavity Ring-Down Spectroscopy of H216O at 10687.36 cm-1

February 11, 2004
Author(s)
Joseph T. Hodges
We describe a frequency-stabilized cavity ring-down spectroscopy apparatus enabling high-resolution line shape measurements of water vapor. The measured line strength and broadening parameter for the H216O transition at 10687.36 cm-1 are compared to

Detection of Trace Water in Phosphine with Cavity Ring-down Spectroscopy

January 1, 2003
Author(s)
Susan Y. Lehman, Kristine A. Bertness, Joseph T. Hodges
Water is a detrimental impurity even at concentrations of 10 nmol/mol or less in source gases for compound semiconductor epitaxial growth. Oxygen complexes from water incorporation cause degraded luminescent efficiency and reduced minority carrier

Trace Water Detection in Phosphine by Cavity Ring-down Spectroscopy

January 1, 2003
Author(s)
Susan Y. Lehman, Kristine A. Bertness, Joseph T. Hodges
We are using cavity ring-down spectroscopy (CRDS) to measure concentrations of water in nitrogen and, for the first time to our knowledge, in phosphine. Water vapor concentrations have been measured in purified and unpurified phosphine, indicating a water

Trace water detection in semiconductor-grade phosphine gas

November 11, 2002
Author(s)
Kristine A. Bertness, Susan Y. Lehman, Joseph T. Hodges, H. H. Funke, Mark W. Raynor
We are applying cavity ring-down spectroscopy (CRDS) to measure water concentrations in nitrogen and, for the first time to our knowledge, in phosphine. Semiconductor-grade phosphine cylinders from different suppliers contained water in the several ppm

Referencing Dilution-Based Trace Humidity Generators to Primary Humidity Standards

June 1, 2001
Author(s)
Peter H. Huang, Gregory E. Scace, Joseph T. Hodges
We describe a technique for measuring the trace humidity level delivered by a permeationtube type moisture generator (PTMG). Amount fractions in the range 10 nmol/mol to 100 nmol/mol of H2O in N2 carrier gas were considered. The measurements are referenced

Uncertainty of the NIST Low Frost-Point Humidity Generator

June 1, 2001
Author(s)
Gregory E. Scace, Joseph T. Hodges
The NIST Low Frost-point Humidity Generator (LFPG) produces water vapor gas mixtures with mole fractions from approximately 5 nmol/mol to 4 mmol/mol for research, calibration of transfer standards, and testing and development of new humidity
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