Hodges, J.
and Scace, G.
(2006),
Developing advanced humidity standards to measure trace water vapor in specialty gases, Micro
(Accessed December 14, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Developing advanced humidity standards to measure trace water vapor in specialty gases
Published
Author(s)
,
Abstract
We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the metrology relevant to the production and delivery of high-purity specialty gases for semiconductor manufacturing are discussed.Citation
Micro
Volume
24
Pub Type
Journals
Keywords
humidity
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2006, Updated February 19, 2017