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Developing advanced humidity standards to measure trace water vapor in specialty gases

Published

Author(s)

Joseph T. Hodges, Gregory E. Scace

Abstract

We describe primary thermodynamic standards for trace humidity generation maintained at NIST. Also, a discussion of NIST calibration services providing traceability of transfer standards to NIST primary standards is presented. Applications to the metrology relevant to the production and delivery of high-purity specialty gases for semiconductor manufacturing are discussed.
Citation
Micro
Volume
24

Keywords

humidity

Citation

Hodges, J. and Scace, G. (2006), Developing advanced humidity standards to measure trace water vapor in specialty gases, Micro (Accessed October 2, 2023)
Created January 1, 2006, Updated February 19, 2017