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Trace water detection in semiconductor-grade phosphine gas



Kristine A. Bertness, Susan Y. Lehman, Joseph T. Hodges, H. H. Funke, Mark W. Raynor


We are applying cavity ring-down spectroscopy (CRDS) to measure water concentrations in nitrogen and, for the first time to our knowledge, in phosphine. Semiconductor-grade phosphine cylinders from different suppliers contained water in the several ppm range. Moisture levels were also measured with point-of-use purifiers from different manufacturers in line. To date, the lowest water mole fraction measured in this system is (150 {+/-}30) x 10-9 (150 ppb) in a nitrogen matrix. Lower concentrations would be detectable at our present signal-to-noise levels. We also present material studies on AlInP grown with characterized phosphine in a gas-source molecular beam epitaxy machine.
Proceedings Title
Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo
Conference Dates
November 11-13, 2002
Conference Location
San Jose, CA


cavity ring-down spectroscopy, impurities, phosphine, semiconductor source gases, water spectroscopy


Bertness, K. , Lehman, S. , Hodges, J. , Funke, H. and Raynor, M. (2002), Trace water detection in semiconductor-grade phosphine gas, Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA, [online], (Accessed April 14, 2024)
Created November 11, 2002, Updated February 19, 2017