@conference{200666,
  author = {Kristine Bertness and Susan Lehman and Joseph Hodges and H. Funke and Mark Raynor},
  title = {Trace water detection in semiconductor-grade phosphine gas},
  year = {2002},
  month = {2002-11-11},
  publisher = {Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30846},
  language = {en},
}