TY  - CONF
AU  - Kristine Bertness
AU  - Susan Lehman
AU  - Joseph Hodges
AU  - H. Funke
AU  - Mark Raynor
C2  - Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA
DA  - 2002-11-11
LA  - en
PB  - Tech. Dig., CS-MAX 2002, Compound Semiconductor Mfg. Expo, San Jose, CA
PY  - 2002
TI  - Trace water detection in semiconductor-grade phosphine gas
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=30846
ER  -