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Search Publications by: William F Guthrie (Assoc)

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Displaying 176 - 192 of 192

Hybrid Optical-Electrical Overlay Test Structure

January 1, 1997
Author(s)
Michael W. Cresswell, Robert Allen, L Linholm, William F. Guthrie, William B. Penzes, A Gurnell
This paper describes the exploratory use of electrical test structures to enable the calibration of optical overlay instruments of the type used to monitor semiconductor-device fabrication processes. Such optical instruments are known to be vulnerable to

Open-Source Excel Tools For Statistical Metrology

Author(s)
Hung-Kung Liu, William F. Guthrie, Juan Soto
In this paper we introduce an approach to construct statistical metrology tools with a Microsoft Excel based interface that use the open source statistical package R as the computational engine. These metrology tools will enable Excel users to access a

Troubleshooting Key Comparisons

Author(s)
Adriana Hornikova, William F. Guthrie
Key Comparisons are international inter-laboratory studies used to establish the degree of equivalence between national measurement standards. These studies, carried out by National Metrology Institutes, are time-consuming, but necessary to facilitate