August 8, 1996
Author(s)
George W. Mulholland, Nelson P. Bryner, Walter S. Liggett Jr, B W. Scheer, R. K. Goodall
In response to the semiconductor industry's need for both smaller calibration particles and more accurately sized larger particles, a joint SEMATECH, National Institute of Standards and Technology, and VLSI Standards, Inc. project was initiated to