June 1, 2012
      
                  
        
  Author(s)
  John D. Wright,   Thiago  Cobu,   Robert F. Berg,   Michael R. Moldover
 
       
            
    
    
        We calibrated three models of commercially-manufactured, laminar flow meters (LFMs) at four pressures (100 kPa, 200 kPa, 300 kPa, and 400 kPa) with five gases (N2, Ar, He, CO2, and SF6) over a 10:1 flow range using NISTs primary flow standards as