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Thermally stable thin-film filters for high-power extreme-ultraviolet applications



Charles S. Tarrio, Robert F. Berg, Thomas B. Lucatorto, Bruce Lairson, Heidi Lopez, Travis Ayers


We investigated several types of thin-film filters for high intensity work in the extreme-ultraviolet (EUV) spectral range. In our application, with a peak EUV intensity of 2.7 W cm-2, Ni-mesh-backed Zr filters have a typical lifetime of 20 hours, at which point they suffer from pinholes and a 50 % loss of transmission. Initial trials with Si filters on Ni meshes resulted in rupture of the filters in less than an hour. A simple thermal calculation showed that the temperature rise in those filters was 580 K. A similar calculation indicated that using a finer mesh with thicker wires and made of Cu reduces the temperature increase to about 40 K. We have exposed a Si filter backed by such a mesh for more than 60 hours with little loss of transmission and no leaks.
Review of Scientific Instruments


extreme-ultraviolet, filters, thin films


Tarrio, C. , Berg, R. , Lucatorto, T. , Lairson, B. , Lopez, H. and Ayers, T. (2015), Thermally stable thin-film filters for high-power extreme-ultraviolet applications, Review of Scientific Instruments, [online], (Accessed April 20, 2024)
Created November 12, 2015, Updated February 19, 2017