@article{208991,
  author = {Charles Tarrio and Robert Berg and Thomas Lucatorto and Bruce Lairson and Heidi Lopez and Travis Ayers},
  title = {Thermally stable thin-film filters for high-power extreme-ultraviolet applications},
  year = {2015},
  number = {86},
  month = {2015-11-12},
  publisher = {Review of Scientific Instruments},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919314},
  language = {en},
}