TY  - JOUR
AU  - Charles Tarrio
AU  - Robert Berg
AU  - Thomas Lucatorto
AU  - Bruce Lairson
AU  - Heidi Lopez
AU  - Travis Ayers
C2  - Review of Scientific Instruments
DA  - 2015-11-12
LA  - en
M1  - 86
PB  - Review of Scientific Instruments
PY  - 2015
TI  - Thermally stable thin-film filters for high-power extreme-ultraviolet applications
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919314
ER  -