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Displaying 2126 - 2150 of 5221

TSV Reveal height and bump dimension metrology by the TSOM method

April 30, 2013
Author(s)
Ravikiran Attota, Haesung Park, Victor H. Vartanian, Ndubuisi G. Orji, Richard A. Allen
Through-focus scanning optical microscopy (TSOM) transforms conventional optical microscopes into truly 3D metrology tools for nanoscale- to- microscale dimensional analysis with nanometer-scale sensitivity. Although not a resolution enhancement method

Use of TSOM for sub-11 nm node pattern defect detection and HAR features

April 30, 2013
Author(s)
Ravikiran Attota, Abraham Arceo, Bunday Benjamin
In-line metrologies currently used in the semiconductor industry are being challenged by the aggressive pace of device scaling and the adoption of novel device architectures. In defect inspection, conventional bright field techniques will not likely be

Frequency-agile, rapid scanning spectroscopy

April 28, 2013
Author(s)
Gar W. Truong, Kevin O. Douglass, Stephen E. Maxwell, Roger D. van Zee, David F. Plusquellic, Joseph T. Hodges, David A. Long
Challenging applications in trace gas analyses require high precision and acquisition rates.1-4 Many continuous-wave laser spectroscopy techniques exhibit significant sensitivity and potential;5 however, their scanning rates are slow because they rely upon

Writing Guidelines for Requests for Proposals for Automated Fingerprint Identification Systems

April 25, 2013
Author(s)
Susan M. Ballou, Michael Garris, Anthony Clay, Joi Dickerson, Peter T. Higgins, Janet Hoin, Lisa Jackson, Mike Lesko, Joe Morrissey, Leo Norton, Beth Owens, Joe Polski, Melissa Taylor
This is one of a series of documents prepared by the Latent Print Automated Fingerprint Identification System (AFIS) Interoperability Working Group. The purpose of these documents is to provide guidance and a framework to those involved in the

The Biological Evidence Preservation Handbook: Best Practices for Evidence Handlers

April 23, 2013
Author(s)
Susan M. Ballou, Margaret C. Kline, Mark D. Stolorow, Melissa Taylor, Shannan Williams, Phylis S. Bamberger, Burney Yvette, Larry Brown, Cynthia E. Jones, Ralph Keaton, William Kiley, Karen Thiessen, Gerry LaPorte, Joseph Latta, Linda E. Ledray, Randy Nagy, Linda Schwind, Stephanie Stoiloff, Brian Ostrom
The report of the Technical Working Group on Biological Evidence Preservation offers guidance for individuals involved in the collection, examination, tracking, packaging, storing, and disposition of biological evidence. This may include crime scene

Determining Mechanical Reliability of Brittle Materials

April 18, 2013
Author(s)
Stephen W. Freiman, Jeffrey Fong
The widespread existence of slow crack growth in most glasses and ceramics due to a stress-enhanced reaction between an external environment and strained bonds at a crack tip greatly complicates the challenge of assuring the reliability of components which

Estimating Uncertainties in Antenna Measurements

April 8, 2013
Author(s)
Michael H. Francis
We describe general methods of estimating uncertainties in antenna measurements. These include estimates based on theory (analysis1), simulation, and altering the measurement system (self-coparison tests). The important component sources of uncertainty in
Displaying 2126 - 2150 of 5221
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