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Displaying 1876 - 1900 of 2177

Accuracy and Traceability in Dimensional Measurements

June 1, 1998
Author(s)
James E. Potzick
Dimensional measurements of importance to microlithography include feature sizes and feature placement on photomasks and wafers, overlay eccentricities, defect and particle sizes on masks and wafers, and many others. A common element is that the object

Developing a Method to Determine Linewidth Based on Counting the Atom-Spacings Across a Line

June 1, 1998
Author(s)
Richard M. Silver, Carsten P. Jensen, V W. Tsai, Joseph Fu, John S. Villarrubia, E C. Teague
We are developing the instrumentation and prototype samples at NIST to enable the counting of atom-spacings across linewidth features etched in silicon. This is an effort to allow the accurate counting of atom-spacings across a feature in a controlled

Measurement of Pitch and Width Samples with the NIST Calibrated Atomic Force Microscope

June 1, 1998
Author(s)
Ronald G. Dixson, R Koning, Theodore V. Vorburger, Joseph Fu, V W. Tsai
Because atomic force microscopes (AFMs) are capable of generating three dimensional images with nanometer level resolution, these instruments are being increasingly used in many industries as tools for dimensional metrology at sub- micrometer length scales

Toward a Unified Advanced CD-SEM Specification for Sub 0.18 Micrometer Technology

June 1, 1998
Author(s)
J Allgair, C Archie, W Banke, H Bogardus, J Griffith, H Marchman, Michael T. Postek, L Saraf, J Schlesinger, B Singh, N. Sullivan, L Trimble, Andras Vladar, A Yanof
The stringent critical dimension (CD) control requirements in cutting edge device facilities have placed significant demands on metrologists and upon the tools they use. We are developing a unified, advanced critical dimension scanning electron microscope

Summary Report of NIST/MSC Workshop on Traceability in Length

April 1, 1998
Author(s)
Dennis A. Swyt
The National Institute of Standards and Technology, in conjunction with the Measurement Science Conference, conducted an industry-needs workshop on February 4, 1998, on issues with U.S. manufacturing companies, particularly smaller ones, may have in

Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab

March 1, 1998
Author(s)
H Amick, B Sennewald, E C. Teague, Brian R. Scace
This paper reports the results of the finite element analysis and in-situ testing of a large-scale (4 m x 10 m) pneumatically isolated concrete slab are reported. The slab was constructed as a design prototype for next generation metrology laboratories at

Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces

March 1, 1998
Author(s)
Egon Marx, I J. Malik, Y Strausser, T Bristow, N Poduje, J C. Stover
Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epitaxial

Tip Characterization for Scanned Probe Microscope Width Metrology

March 1, 1998
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of the

Uncertainty Analysis for Angle Calibrations Using Circle Closure

March 1, 1998
Author(s)
William T. Estler
We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously

Advances in NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, David J. Pitchure, Theodore V. Vorburger
Recent developments in standard hardness machines and microform calibration techniques have made it possible to establish a worldwide unified Rockwell hardness scale with metrological traceability. This includes the establishments of the reference

An Integrated Approach to Optimal Three Dimensional Layout and Routing

January 1, 1998
Author(s)
Simon Szykman, J Cagan, P Weisser
This paper describes the combination of previously-developed component placement and routing algorithms into an integrated computational approach to product layout optimization. Previous work introduced simulated annealing-based algorithms for optimal

Combining Interactive Exploration and Optimization for Assembly Design

January 1, 1998
Author(s)
Simon Szykman, Gerard Kim
This paper presents an integrated framework for assembly design. The framework will allow the designer to represent knowledge about the design process and constraints as well as information about the artifact being designed, design history and rationale
Displaying 1876 - 1900 of 2177
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