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Ultra-Precision Linear Motion Metrology of a Commerically Available Linear Translation Stage

Published

Author(s)

Ronnie R. Fesperman Jr., M A. Donmez, Shawn P. Moylan

Abstract

Many new compact ultra-precision linear translation stages with exceptionally long ranges of motion on the order of tens of millimeters and positioning resolutions on the order of a nanometer are finding their way into emerging nanotechnologies. This class of positioning system typically has specified linear error motions on the order of a few hundred nanometers or better and angular error motions on the order of 10 arcsec or better. However, measuring and certifying the positioning performance of these new stages with off-the-self instrumentation prescribed by international standards can be very challenging if the test uncertainty ratio is to be greater or equal to 4:1. This paper gives an overview of our effort to extend our measurement capabilities to measure the six error motions of a commercial nanopositioner that has a max travel of 110 mm and a positioning resolution of 1 nm. Test uncertainty ratios of 15:1 to 1.5:1 are achieved.
Proceedings Title
Proceedings of the 26th Annual Meeting of the American Society for Precision Engineering (ASPE)
Conference Dates
November 13-18, 2011
Conference Location
Denver, CO

Keywords

metrology, linear positioning, straightness, angular deviation, measurement uncertainty

Citation

Fesperman, R. , Donmez, M. and Moylan, S. (2011), Ultra-Precision Linear Motion Metrology of a Commerically Available Linear Translation Stage, Proceedings of the 26th Annual Meeting of the American Society for Precision Engineering (ASPE), Denver, CO, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909376 (Accessed April 19, 2024)
Created November 18, 2011, Updated February 19, 2017