Electrochemical Micromachining of NiTi Shape Memory Alloys with Ultrashort Voltage Pulses
Joseph Maurer, John Hudson, Steven E. Fick, Thomas P. Moffat, Gordon A. Shaw
Electrochemical micromachining (ECMM) with ultrashort voltage pulses has been used to fabricate microstructures on a NiTi shape memory alloy (SMA). Because of its unique properties, NiTi is a desirable material for use in various applications including medical devices and actuators. ECMM is a heat free, strain free, and mask free method for microfabrication, and therefore well suited for use with shape memory alloys . Microstructures were machined to a depth of 3 μm on NiTi surfaces, and the lateral resolution of the machining was found to be dependent on the duration of the voltage pulses used.
Electrochemical and Solid State Letters
Electrochemical Etching, Electrochemical Synthesis and Engineering, Nanostructured Materials)
, Hudson, J.
, Fick, S.
, Moffat, T.
and Shaw, G.
Electrochemical Micromachining of NiTi Shape Memory Alloys with Ultrashort Voltage Pulses, Electrochemical and Solid State Letters
(Accessed December 11, 2023)