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Capacitive readout technique for studies of dissipation in GaN nanowire mechanical resonators



Kristine A. Bertness, Joshua R. Montague, Norman A. Sanford, Victor Bright, Charles T. Rogers


A variable-temperature, homodyne reflectometry measurement technique for detecting nanoscale mechanical motion has recently been developed. We have extended this technique to make the first all-electrical measurements of an ensemble of as-grown, c-axis, single-crystal, gallium nitride (GaN) nanowires. These nanowires are approximately 15 µυm in length, 100 nm in diameter, have fundamental resonance frequencies near 1 MHz, and mechanical quality factors, Q, (resonance frequency divided by resonance width) in excess of 104. These high-Q values are sensitive to surface conditions and offer the opportunity to study intrinsic damping mechanisms in the nanoscale resonators. The new microwave measurement technique has allowed us to study the ensemble behavior of nanowire resonances while varying extrinsic variables (e.g. temperature) and obtain statistics on nanowire resonance behavior. Our apparatus allows measurements to be made in either a two-phase lock-in mode, or in a power spectrum mode, both of which have unique advantages. Our measurements demonstrate a position spectral noise floor of 0.3 nm/√√Hz, largely set by the dynamic range of our microwave readout system.
Proceedings Title
Proceedings of the International Mechanical Engineering Congress & Exposition
Conference Dates
November 11-17, 2011
Conference Location
Denver, CO
Conference Title
IMECE 2011


Bertness, K. , Montague, J. , Sanford, N. , Bright, V. and Rogers, C. (2011), Capacitive readout technique for studies of dissipation in GaN nanowire mechanical resonators, Proceedings of the International Mechanical Engineering Congress & Exposition, Denver, CO (Accessed June 20, 2024)


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Created November 11, 2011, Updated December 19, 2019