Gaitan, M.
and Lightman, K.
(2011),
ROADMAPPING MANUFACTURING NEEDS FOR MEMS TECHNOLOGIES, Technologies for Future Micro-Nano Manufacturing
(Accessed May 11, 2025)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
ROADMAPPING MANUFACTURING NEEDS FOR MEMS TECHNOLOGIES
Published
Author(s)
, Karen Lightman
Abstract
This report summarizes issues in manufacturing from the 2011 iNEMI MEMS Technology Roadmap, and shares the authors observations from the 2011 MEMS Industry Groups (MIG) Workshop on Device Testing and the 2012 ITRS MEMS Technology Working Groups (TWG) roadmapping activities. Virtually all MEMS R&D investment has gone into the front-end of manufacturing (device and process development), yet the back-end (packaging and testing) generally consumes 2⁄3 of the total manufacturing cost. The development of a consensus opinion that articulates the issues that the industry faces at the back-end may be helpful in identifying opportunities for optimizing R&D investment to meet critical back-end manufacturing needs.Citation
Technologies for Future Micro-Nano Manufacturing
Pub Type
Others
Keywords
Technology Roadmapping, MIG, MEMS, iNEMI, ITRS, Back-End, Packaging, Device Testing
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created September 30, 2011, Updated July 28, 2017