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Displaying 58326 - 58350 of 74474

Controls and Sensors for Advanced Manufacturing

January 1, 1994
Author(s)
Frederick M. Proctor
This paper describes research into improving the performance of machine tools and robots. Techniques for improving accuracy, such as thermal compensation, automatic teaching, and force-based surface and edge finishing, are described. These techniques have

Critical Issues in Scanning Electron Microscope Metrology

January 1, 1994
Author(s)
Michael T. Postek
During the manufacturing of present-day integrated circuits, certain measurements must be made of the submicrometer structures composing the device with a high degree of repeatability. Optical microscopy, scanning electron microscopy, and the various forms
Displaying 58326 - 58350 of 74474
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