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Displaying 55601 - 55625 of 74167

A critical evalution of thermal mass flow meters

January 5, 1996
Author(s)
S A. Tison
Many semiconductor processes require that stable and known flows of gas be delivered to the processing chamber. The thermal mass flow meter (TMFM) is used almost exclusively in the semiconductor industry for the admission of process gases. While TMFM’s have

A Closed Loop Controller for Electron-beam Evaporators

January 1, 1996
Author(s)
Alan H. Band, Joseph A. Stroscio
A simple instrument for automatically controlling the deposition rate of an electronbeam evaporator is described. The design incorporates a commercially available, microprocessor based, Proportional-Integral-Differential (PID) process controller which

A Framework for Control Architecture

January 1, 1996
Author(s)
M. K. Senehi, R Kramer
The development of architectures for control systems has been an active area of research for at least twenty years. This research has produced many different architectures which use different terminologies and address different issues. In order to analyze
Displaying 55601 - 55625 of 74167
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