January 1, 1999
      
                  
        
  Author(s)
  R M. Walton,   Richard E. Cavicchi,   Stephen  Semancik,   B  Panchapakesan,   Don L. DeVoe,   M I. Aquino-Class,   J D. Allen,   John S. Suehle
 
       
            
    
    
        We describe solid state gas microsensor array technology for real-time, low-cost environmental and industrial monitoring. The four-element, surface-micromachined arrays are designed in CMOS technology and consist of multiple platforms called microhotplates