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Self-Calibration and Error Compensation Using Reference Position Markers

Published

Author(s)

H Zou

Abstract

In this paper, reference position markers are proposed for self-calibration and error compensation. Self-calibration of x-y motion guides is discussed with a focus on the orthogonality calibration. An algorithm is developed using a closure method and reference position markers. The calibration uncertainty is estimated. Self-calibration of Abbe error is discussed: two sets of measurements made at different Abbe offsets combined with the use of reference position markers are proposed to develop an error map for Abbe error compensation. The limitation of pre-processed error compensation is also discussed.
Proceedings Title
Measurement Science Conference
Conference Dates
January 20-21, 1999
Conference Location
Anaheim, CA
Conference Title
Measurements Science Conference

Keywords

Abbe error, error compensation, orthogonality, pre-process, reference position markers, self-calibration

Citation

Zou, H. (1999), Self-Calibration and Error Compensation Using Reference Position Markers, Measurement Science Conference, Anaheim, CA (Accessed April 19, 2024)
Created January 1, 1999, Updated February 19, 2017