November 18, 1999
      
                  
        
  Author(s)
  Richard E. Cavicchi,   Stephen  Semancik,   R M. Walton,   B  Panchapakesan,   Don L. DeVoe,   M I. Aquino-Class,   J D. Allen,   John S. Suehle
 
       
            
    
    
        In this work, micromachining and planar processing has been used to achieve solid state sensing devices with lower power consumption at lower cost. The small size brings new advantages for chemical selectivity as well: multi-element whose time-varying