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NIST Priority Action Plan 2: Guidelines for Assessing Wireless Standards for Smart Grid Applications:

January 1, 2011

Author(s)

David E. Cypher, Nada T. Golmie

NIST Simulation of E-beam Inspection and CD-SEM in-line metrology: Final Report

January 1, 2011

Author(s)

John S. Villarrubia

This report summarizes results from a two-year project to develop a simulator for electron beam inspection and critical dimension scanning electron microscope (SEM) inline metrology tools. The development attempts to improve on prior simulators and develop