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Displaying 47051 - 47075 of 74171

SEM Sentinel - SEM Performance Measurement System

January 1, 2001
Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope (CD-SEM). Experiments were performed for tests involving diagnosis of the vacuum system and

Sensor-Driven Fire Model Version 1.1 (NISTIR 6705)

January 1, 2001
Author(s)
William D. Davis, Glenn P. Forney
Modern building fire sensors are capable of supplying substantially more information to the fire service than just the simple detection of a possible fire. With the increase in the number of sensors installed in buildings for non-fire purposes, it is

Separation of Inner Shell Vacancy Transfer Mechanisms in Collisions of Slow Ar 17+ Ions with SiO 2

January 1, 2001
Author(s)
E Takacs, Z Ber nyi, John D. Gillaspy, L P. Ratliff, Ronaldo Minniti, J Pedulla, R Deslattes, N Stolterfoht
We have studied the spectrum of x-rays emitted when hydrogen-like argon ions impact silicon dioxide surfaces. Specifically, we were interested in the mechanism for creation of K-shell holes in the silicon target atoms, which can be filled with the release

SI Traceability of Force at the Nanonewton Level

January 1, 2001
Author(s)
David B. Newell, Jon R. Pratt, John A. Kramar, Douglas T. Smith, L Feeney, Edwin R. Williams
Although nanonewton force measurements are commonplace in industry, no National Measurement Institute supports a link to the International System of Units (SI) below one newton. The National Institute of Standards and Technology has launched a five-year
Displaying 47051 - 47075 of 74171
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