January 1, 2001
Author(s)
Stephen M. Hsu, P M. McGuiggan, J Zhang, Y L. Wang, F Yin, Y P. Yeh, Richard S. Gates
An atomic force microscope (AFM), a surface forces apparatus (SFA), and a ball-on-inclined plane (BOIP) apparatus were used to measure the mechanical properties of thin films. The frictional force (lateral resistance) of a set of four samples with