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Displaying 40051 - 40075 of 73960

Shape-Sensitive Linewidth Measurements of Resist Structures

January 1, 2004
Author(s)
John S. Villarrubia, Andras Vladar, Michael T. Postek
Widths of developed 193 nm resist lines were measured by two methods and compared. One method was a new model-based library method. In this method the scanning electron microscope (SEM) images corresponding to various edge shapes are simulated in advance

Single-Electron Transistor Spectroscopy of InGaAs Self-Assembled Quantum Dots

January 1, 2004
Author(s)
Kevin Osborn, Mark W. Keller, Richard Mirin
A single-electron transistor is used to detect tunneling of single electrons into self-assembled InGaAs quantum dots. Aluminum single-electron transistors (SETs) are fabricated over an MBE-grown structure containing quantum dots (QDs) and an underlying n

Spot Weld Analysis with Two-Dimensional Ultrasonic Arrays

January 1, 2004
Author(s)
D A. Denisov, Craig M. Shakarji, R G. Maev, J M. Paille, B B. Lawford
This paper describes a threefold method of testing the performance of an array-based ultrasonic tool for nondestructive testing of spot welds. The tool is described in its capabilities, use, and advantages over existing counterparts. Performance testing is
Displaying 40051 - 40075 of 73960
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