April 8, 2008
      
                  
        
  Author(s)
  Fabio C. da Silva,   Sean  Halloran,   Lu  Yuan,   David P.  Pappas
 
       
            
    
    
        A thin-film sensor is described that measures the component of the magnetic field perpendicular to the plane of the substrate (also called the z-component field.) The sensors are fabricated on anisotropically etched, V-shaped groves on Si(100) substrates