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Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis

Published

Author(s)

James Moyne, Ya-Shian Li-Baboud, Xiao Zhu, Dhananjay Anand, Sulaiman Hussain

Abstract

The ability to acquire quality equipment and process data is pertinent for future real-time process control systems to maximize opportunities for semiconductor manufacturing yield enhancement and equipment efficiency. Clock synchronization for accurate time-stamping and maintaining a consistent frequency in trace data collection are essential for accurate merging of data from heterogeneous sources. To characterize the factors impacting data collection synchronization and performance, a configurable fab-wide equipment data acquisition (EDA) simulator is being developed. By understanding the factors impacting clock synchronization and accurate time-stamping, the simulator can also be used to explore methods to mitigate the latencies and provide guidance on time-stamping for equipment data acquisition systems.
Proceedings Title
ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication
Conference Dates
September 22-26, 2008
Conference Location
Ann Arbor, MI, US

Keywords

time synchronization, data acquisition, semiconductor manufacturing, data quality, Equipment Data Acquisition standard

Citation

Moyne, J. , Li-Baboud, Y. , Zhu, X. , Anand, D. and Hussain, S. (2008), Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis, ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33160 (Accessed July 24, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created September 21, 2008, Updated October 12, 2021