@conference{803186, author = {James Moyne and Ya-Shian Li-Baboud and Xiao Zhu and Dhananjay Anand and Sulaiman Hussain}, title = {Semiconductor Manufacturing Equipment Data Acquisition Simulation for Timing Performance Analysis}, year = {2008}, month = {2008-09-22 00:09:00}, publisher = {ISPCS 2008 International IEEE Symposium on Precision Clock Synchronization for Measurement, Control and Communication, Ann Arbor, MI, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33160}, language = {en}, }