June 1, 2000
Author(s)
Ronald G. Dixson, R Koning, Joseph Fu, Theodore V. Vorburger, Thomas B. Renegar
… developed the calibrated AFM (C-AFM) to calibrate physical standards for other AFMs. The C-AFM has displacement … we are working toward the development of linewidth standards through the comparison of C-AFM width measurements … metrology, nanotube, pitch, scale calibration, SPM, standards, step height …