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Search Publications

NIST Authors in Bold

Displaying 2551 - 2575 of 4197

ITRS Chapter: MEMS

January 30, 2013
Author(s)
Michael Gaitan
… applications represent the fastest growing segment in MEMS manufacturing, according to 2011 market forecasts by iSuppli, …

An Information Model Standard for Facility Integration With A Smart Grid

November 1, 2011
Author(s)
Steven T. Bushby
The National Electrical Manufacturer's Association (NEMA) and the American Society of Heating Refrigerating, and Air-Conditioning Engineers (ASHRAE) are working to cooperatively develop a national Facility Smart Grid Information Model standard. This

Glass and Dimensional Metrology

April 1, 1997
Author(s)
Theodore D. Doiron
Ordinary glass, even good optical quality glass, will shrink up to 20 micrometers/meter over the first few years after its manufacture. Gages made of glass are therefore not suitable as high accuracy artifacts unless they are calibrated often. Better

A Calibrated Atomic Force Microscope

January 1, 1994
Author(s)
T Mcwaid, J Schneir
… incorporated into industrial research and development, and manufacturing facilities. At present there are no …

AlGaAs Composition Measurements from In Situ Optical Reflectance

July 1, 2000
Author(s)
Kristine A. Bertness, J T. Armstrong, Ryna B. Marinenko, Larry Robins, Albert J. Paul, Joseph G. Pellegrino, Paul M. Amirtharaj, Deane Chandler-Horowitz
… LEOS Summer Topical on Optical Sensing in Semiconductor Manufacturing

The NIST Design/Process Planning Integration Project

September 1, 1998
Author(s)
Walter W. Nederbragt, Robert Allen, Shaw C. Feng, Serge Kaing, Ram D. Sriram, Yuyun Zhang
… Proceedings of Advanced Technology & Manufacturing: State-of-the-Art & State of Practice Workshop …

Measurements of the LIGO Pathfinder Optics

November 1, 1997
Author(s)
R E. Parks, Christopher J. Evans, P Sullivan, Lianzhen Shao, B Loucks
… Proceedings of SPIE, Optical Manufacturing and Testing II, H. Philip Stahl, Editor …

A SUPER-METAMODELLING FRAMEWORK TO OPTIMIZE SYSTEM PREDICTABILITY

August 25, 2018
Author(s)
Yan Lu, Douglas Eddy, Sundar Krishnamurty, Ian Grosse
… Statistical metamodels can robustly predict manufacturing process and engineering systems design results. … various scenarios. A case study conducted with additive manufacturing process data shows method effectiveness in …

Traceable Calibration of a Critical Dimension Atomic Force Microscope

June 6, 2011
Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Craig D. McGray, Jon C. Geist
… this sort that are commonly encountered in semiconductor manufacturing and other nanotechnology industries. NIST has … budgets for typical measurands in semiconductor manufacturing metrology. A third generation CD-AFM was …

Applications of a 3D Range Camera Towards Healthcare Mobility Aids

October 3, 2006
Author(s)
Roger V. Bostelman, Peter Russo, James S. Albus, Tsai Hong Hong, Rajmohan Madhavan
… mobile robots. These robots have potential applications in manufacturing, healthcare and perhaps several other service related areas beyond the scope of this paper. In manufacturing, the 3D range camera shows promise for standard …

Performance Evaluation Facility for LADARs

April 12, 2004
Author(s)
Geraldine S. Cheok, William C. Stone
… research into the applications of LADARs for construction, manufacturing, and autonomous vehicle navigation. However, …
Displaying 2551 - 2575 of 4197
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