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Displaying 58276 - 58300 of 74675

Acid Gas Production in Inhibited Diffusion Flames

May 3, 1994
Author(s)
Gregory T. Linteris, M D. King, A Liu, C A. Womeldorf, Y. E. Hsin
The proposed replacements to halon 1301, mainly fluorinated and chlorinated hydrocarbons, are expected to be required in significantly higher concentrations than CF3Br to extinguish fires. At these higher concentrations the by-products of the inhibited

A Monte Carlo Model for SEM Linewidth Metrology

May 1, 1994
Author(s)
J R. Lowney, Michael T. Postek, Andras Vladar
A scanning electron microscope (SEM) can be used to measure the dimensions of the microlithographic features of integrated circuits. However, without a good model of the electron-beam / specimen interaction, accurate edge location cannot be obtained. A

An Instrument for Calibrating Atomic Force Microscope Standards

May 1, 1994
Author(s)
J Schneir, T Mcwaid, Theodore V. Vorburger
To facilitate the use of AFMs for manufacturing we have initiated a project to develop and calibrate artifacts which can in turn be used to calibrate a commercial AFM so that subsequent AFM measurement are accurate and traceable back to the wavelength of

An Update Guide for HAZARD I Version 1.2

May 1, 1994
Author(s)
Richard D. Peacock, Walter W. Jones, Glenn P. Forney, Paul A. Reneke, Richard W. Bukowski, J H. Klote
A method for quantifying the hazards to occupants of buildings from fires, and the relative contribution of specific products (e.g., furniture, wire insulation) to those hazards is presented. This method,called HAZARD I, combines expert judgment and

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

May 1, 1994
Author(s)
Michael W. Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E C. Teague
This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature placement by a primary pattern generator. A new test structure has now been developed from the

Fire Conditions for Smoke Toxicity Measurement

May 1, 1994
Author(s)
Richard G. Gann, V Babrauskas, Richard D. Peacock, J R. Hall
This paper identifies those fire conditions most often present when smoke toxicity is the cause of death. It begins with a review of the evidence that smoke-inhalation deaths are in the majority in fire fatalities in the United States. Next, there is an
Displaying 58276 - 58300 of 74675
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