October 12, 2021
Author(s)
P Sule, M. Menyhard, L Kotis, J Labar, William F. Egelhoff Jr.
The ion-sputtering induced intermixing is studied by Monte-Carlo TRIM, molecular dynamics (MD) simulations, and Auger electron spectroscopy depth pro_ling (AES-DP) analysis in Pt/Ti/Si substrate (Pt/Ti) and Ta/Ti/Pt/Si substrate (Ti/Pt) multilayers