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Chemistry

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Displaying 1051 - 1075 of 1934

Measurement of Gate-Oxide Film Thickness by X-ray Photoelectron Spectroscopy

September 1, 2003
Author(s)
Cedric J. Powell, Aleksander Jablonski
X-Ray Photoelectron Spectroscopy (XPS) is being used to an increasing extent for the characterization of new gate-oxide materials, particularly for the determination of film composition, uniformity, and thickness. A key parameter for film-thickness

Temperature Metrology and Its Impact on Industry

September 1, 2003
Author(s)
Hratch G. Semerjian, Ellyn S. Beary
Temperature measurement represents one of the most frequently and broadly used measurements, with a majority of products manufactured having temperature measurement devices as an esential component. The accuracy and precision of these temperature

Temperature-Dependent Materials Research with Micromachined Array Platforms

August 1, 2003
Author(s)
Stephen Semancik
This chapter describes the efficiency of studying temperature-dependent materials processing/property/performance relationships with MEMS-based microarrays. Varied types of microsamples (~ 100 m x 100 m in lateral dimension, and of thicknesses between ~ 10

Isotopic Metrology of Carbon Dioxide. I. Interlaboratory Comparison and Empirical Modeling of Inlet Equilibration Time, Inlet Pressure, and Ion Source Conductance

June 1, 2003
Author(s)
R M. Verkouteren, C E. Allison, S A. Studley, K J. Leckrone
We report a pilot study of high-precision differential isotopic ratio measurements made on replicate samples of pure carbon dioxide using three instruments of identical manufacture. Measurement protocols were designed to explore the effects of sample size
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