Practical Guide for Inelastic Mean Free Paths, Effective Attenuation Lengths, Mean Escape Depths, and Information Depths in X-ray Photoelectron SpectroscopyInformation Depths in X-ray Photoelectron Spectroscopy

Published

February 20, 2020

Author(s)

Cedric J. Powell

Abstract

Information is provided on four terms that are used for different purposes in X-ray photoelectron spectroscopy (XPS): the inelastic mean free path (IMFP), the effective attenuation length (EAL), the mean escape depth (MED), and the information depth (ID). While the IMFP is a material parameter that depends on electron energy, the other three terms depend both on the IMFP and on the instrumental configuration. In addition, different EALs can be defined for different XPS applications, and the numerical values for each application can differ. Guidance is given on sources of IMFP and EAL data and on predictive equations for IMFPs, EALs, MEDs, and IDs. This guide is one of a series intended to highlight best practices in the use of XPS.

Citation

Journal of Vacuum Science & Technology A

Volume

38

Issue

2

Pub Type

Journals

Download Paper

https://doi.org/10.1116/1.5141079

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Keywords

effective attenuation length, inelastic mean free path, information depth, mean escape depth, x-ray photoelectron spectroscopy X-ray photoelectron spectroscopyx-ray photoelectron spectroscopy

Citation

Powell, C. (2020), Practical Guide for Inelastic Mean Free Paths, Effective Attenuation Lengths, Mean Escape Depths, and Information Depths in X-ray Photoelectron SpectroscopyInformation Depths in X-ray Photoelectron Spectroscopy, Journal of Vacuum Science & Technology A, [online], https://doi.org/10.1116/1.5141079, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=929257 (Accessed October 8, 2025)