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PUBLICATIONS

Neutron Reflectivity Measurements for the Interfacial Characterization of Polymer Thin Film Photoresists

Published

Author(s)

Eric K. Lin, Christopher L. Soles, Wen-Li Wu, Sushil K. Satija, Q Lin, M Angelopoulos
Conference Location
Brookfield, CT
Conference Title
Proceedings of the 12th International Conference on Photopolymers
Pub Type
Conferences

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Local Download

Keywords

Diffusion, Electronic Materials, Lithography, Reflectivity, Thin Films, interfacial broadenting, neutron reflectivity, photolithography, polymer interdiffusion

Citation

Lin, E. , Soles, C. , Wu, W. , Satija, S. , Lin, Q. and Angelopoulos, M. (2001), Neutron Reflectivity Measurements for the Interfacial Characterization of Polymer Thin Film Photoresists, Proceedings of the 12th International Conference on Photopolymers, Brookfield, CT, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853773 (Accessed October 8, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2001, Updated February 17, 2017