@conference{169196, author = {Eric Lin and Christopher Soles and Wen-Li Wu and Sushil Satija and Q Lin and M Angelopoulos}, title = {Neutron Reflectivity Measurements for the Interfacial Characterization of Polymer Thin Film Photoresists}, year = {2001}, month = {2001-01-01}, publisher = {Proceedings of the 12th International Conference on Photopolymers, Brookfield, CT}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853773}, language = {en}, }